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Filing Detail
Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-05-029076
Filing Date
2005-05-19
Accepted
2005-05-19 12:31:11
Documents
2
Period of Report
2005-05-12

Document Format Files

Seq Description Document Type Size
1 rrd79009.html 3  
1 rrd79009.xml 3 13610
2 POWER OF ATTORNEY DATED MAY 12, 2005 rrd67443_76548.htm EX-99. 2493
  Complete submission text file 0001181431-05-029076.txt   17859
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 978-787-4000
Halterman Craig M (Reporting) CIK: 0001327116 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 05843943