EDGAR Filing Documents for 0001181431-05-003484

Form 3 - Initial statement of beneficial ownership of securities:

SEC Accession No. 0001181431-05-003484

Filing Date

2005-01-19

Accepted

2005-01-19 12:21:15

Documents

Period of Report

2005-01-10

Document Format Files

Seq	Description	Document	Type	Size
1	PALETTE FORM 3	rrd64489.html	3
1	PALETTE FORM 3	rrd64489.xml	3	14188
2	POWER OF ATTORNEY DATED JANUARY 11, 2005	rrd54288_61301.htm	EX-99.	2351
	Complete submission text file	0001181431-05-003484.txt		18495

Mailing Address

Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01915

Business Address 978-787-4000

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 05535529