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Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0001181431-05-003481
Filing Date
2005-01-19
Accepted
2005-01-19 12:20:20
Documents
2
Period of Report
2005-01-10

Document Format Files

Seq Description Document Type Size
1 BREWER FORM 3 rrd64548.html 3  
1 BREWER FORM 3 rrd64548.xml 3 14207
2 POWER OF ATTORNEY DATED JANUARY 11, 2005 rrd54336_61305.htm EX-99. 2349
  Complete submission text file 0001181431-05-003481.txt   18509
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address AXCELIS TECHNOLOGIES, INC. 108 CHERRY HILL DRIVE BEVERLY MA 01938
Business Address 978-787-4000
BREWER KEVIN J (Reporting) CIK: 0001314431 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 05535526