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Filing Detail
Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-04-032494
Filing Date
2004-06-28
Accepted
2004-06-28 09:09:25
Documents
1
Period of Report
2004-06-25

Document Format Files

Seq Description Document Type Size
1 DUFF JUNE 2004 OPTION GRANT rrd46206.html 4  
1 DUFF JUNE 2004 OPTION GRANT rrd46206.xml 4 3977
  Complete submission text file 0001181431-04-032494.txt   5684
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053
DUFF DAVID (Reporting) CIK: 0001195657 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 04883298