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Filing Detail
Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-03-006981
Filing Date
2003-05-05
Accepted
2003-05-06 15:59:18
Documents
1
Period of Report
2003-05-01

Document Format Files

Seq Description Document Type Size
1 DUFF MAY 1 FORM 4 rrd8183.html 4  
1 DUFF MAY 1 FORM 4 rrd8183.xml 4 2956
  Complete submission text file 0001181431-03-006981.txt   4681
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053
DUFF DAVID (Reporting) CIK: 0001195657 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 03684358