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Filing Detail
Form 5 - Annual statement of changes in beneficial ownership of securities:
SEC Accession No. 0001181431-03-001476
Filing Date
2003-02-03
Accepted
2003-02-03 16:09:49
Documents
1
Period of Report
2002-12-31

Document Format Files

Seq Description Document Type Size
1 FORM 5 2002 rrd3989.htm 5 14292
  Complete submission text file 0001181431-03-001476.txt   16058
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Subject) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 5 | Act: 34 | File No.: 000-30941 | Film No.: 03536699
SIC: 3559 Special Industry Machinery, NEC

Mailing Address
Business Address AXCELIS TECHNOLOGIES INC BEVERLY MA 01915-1053
TAKAHASHI NAOKI (Reporting) CIK: 0001195663 (see all company filings)