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Filing Detail
Form SC 13G - Statement of acquisition of beneficial ownership by individuals:
SEC Accession No. 0001133527-03-000028
Filing Date
2003-02-04
Accepted
2003-02-04 16:05:56
Documents
1

Document Format Files

Seq Description Document Type Size
1 AXCELIS 13G AS OF 12/31/02 axcelis13gdec3102.txt SC 13G 21323
  Complete submission text file 0001133527-03-000028.txt   23322
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Subject) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SC 13G | Act: 34 | File No.: 005-60443 | Film No.: 03538737
SIC: 3559 Special Industry Machinery, NEC

Mailing Address 301 S COLLEGE ST STE 3200 CHARLOTTE NC 28202
Business Address 301 S COLLEGE ST STE 3200 CHARLOTTE NC 28202 7043728670
STERLING CAPITAL MANAGEMENT LLC (Filed by) CIK: 0001133527 (see all company filings)

IRS No.: 562226389 | State of Incorp.: NC | Fiscal Year End: 1231