Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001113232-03-000003
Filing Date
2003-05-01
Accepted
2003-04-30 18:53:54
Documents
4
Period of Report
2003-04-30
Effectiveness Date
2003-05-01

Document Format Files

Seq Description Document Type Size
1 DEFINITIVE PROXY STATEMENT aclsdef14a.htm DEF 14A 212774
3 ACLSLOGO.JPG aclslogo.jpg GRAPHIC 6740
4 LOGO_BLUE.GIF logo_blue.gif GRAPHIC 3057
5 STKPERF.JPG stkperf.jpg GRAPHIC 41421
  Complete submission text file 0001113232-03-000003.txt   265866
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 03674576
SIC: 3559 Special Industry Machinery, NEC