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Filing Detail
Form 10-K/A - Annual report [Section 13 and 15(d), not S-K Item 405]: [Amend]
SEC Accession No. 0001113232-02-000007
Filing Date
2002-06-28
Accepted
2002-06-28 16:26:43
Documents
2
Period of Report
2001-12-31

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. form10ka.htm 10-K/A 268161
3 CONSENT OF ERNST & YOUNG LLP ex23_2.txt EX-23 893
  Complete submission text file 0001113232-02-000007.txt   270679
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K/A | Act: 34 | File No.: 000-30941 | Film No.: 02691730
SIC: 3559 Special Industry Machinery, NEC