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Filing Detail
Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001113232-02-000004
Filing Date
2002-03-20
Accepted
2002-03-20 00:00:00
Documents
4
Period of Report
2002-05-01

Document Format Files

Seq Description Document Type Size
1 DEFINITIVE PROXY STATEMENT aclsdef14a.htm DEF 14A 256149
3 LOGO_BLUE.GIF logo_blue.gif GRAPHIC 3057
4 STKPERF.JPG stkperf.jpg GRAPHIC 44963
5 ACLSLOGO.JPG aclslogo.jpg GRAPHIC 6740
  Complete submission text file 0001113232-02-000004.txt   312717
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 02580079
SIC: 3559 Special Industry Machinery, NEC