Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-25-029630
Filing Date
2025-03-31
Accepted
2025-03-31 08:00:34
Documents
21
Period of Report
2025-05-07

Document Format Files

Seq Description Document Type Size
1 DEF 14A tm252354-2_def14a.htm   iXBRL DEF 14A 1154975
5 GRAPHIC bc_ceoandother-4c.jpg GRAPHIC 59278
6 GRAPHIC bc_ceorealized-4c.jpg GRAPHIC 45884
7 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 12591
8 GRAPHIC px_axcelis2025pg01-4c.jpg GRAPHIC 405831
9 GRAPHIC px_axcelis2025pg02-4c.jpg GRAPHIC 259130
10 GRAPHIC tb_boardcomm-4c.jpg GRAPHIC 64587
  Complete submission text file 0001104659-25-029630.txt   4167911

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20241231.xsd EX-101.SCH 4913
3 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE acls-20241231_def.xml EX-101.DEF 1879
4 XBRL TAXONOMY EXTENSION LABEL LINKBASE acls-20241231_lab.xml EX-101.LAB 9445
23 EXTRACTED XBRL INSTANCE DOCUMENT tm252354-2_def14a_htm.xml XML 252945
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 25788984
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)