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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-24-040855
Filing Date
2024-03-29
Accepted
2024-03-29 08:01:11
Documents
23
Period of Report
2024-05-09

Document Format Files

Seq Description Document Type Size
1 FORM DEF 14A tm242686-d4_def14a.htm   iXBRL DEF 14A 1156304
6 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 12611
7 GRAPHIC pc_boardnom-4c.jpg GRAPHIC 43667
8 GRAPHIC pc_tenure-4c.jpg GRAPHIC 36485
9 GRAPHIC ic_tickmark-bw.jpg GRAPHIC 1339
10 GRAPHIC tb_auditcompetc-4c.jpg GRAPHIC 73732
11 GRAPHIC bc_ceoother-4c.jpg GRAPHIC 59311
12 GRAPHIC bc_ceorealized-4c.jpg GRAPHIC 42931
13 GRAPHIC px_axcelis24page01-4c.jpg GRAPHIC 407308
14 GRAPHIC px_axcelis24page02-4c.jpg GRAPHIC 254523
  Complete submission text file 0001104659-24-040855.txt   4465462

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20231231.xsd EX-101.SCH 6547
3 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE acls-20231231_def.xml EX-101.DEF 6264
4 XBRL TAXONOMY EXTENSION LABEL LINKBASE acls-20231231_lab.xml EX-101.LAB 19087
5 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE acls-20231231_pre.xml EX-101.PRE 8468
26 EXTRACTED XBRL INSTANCE DOCUMENT tm242686-d4_def14a_htm.xml XML 298327
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 24802062
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)