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Filing Detail
Form S-3ASR - Automatic shelf registration statement of securities of well-known seasoned issuers:
SEC Accession No. 0001104659-23-087226
Filing Date
2023-08-03
Accepted
2023-08-03 15:14:12
Documents
9
Effectiveness Date
2023-08-03

Document Format Files

Seq Description Document Type Size
1 S-3ASR tm2321901-1_s3asr.htm S-3ASR 286650
2 EXHIBIT 4.1 tm2321901d2_ex4-1.htm EX-4.1 369316
3 EXHIBIT 5.1 tm2321901d2_ex5-1.htm EX-5.1 27168
4 EXHIBIT 23.1 tm2321901d1_ex23-1.htm EX-23.1 2335
5 EX-FILING FEES tm2321901d2_ex-filingfees.htm EX-FILING FEES 31737
6 GRAPHIC lg_axcelis-pn.jpg GRAPHIC 24822
7 GRAPHIC tm2321901d2_ex5-1img01.jpg GRAPHIC 6439
8 GRAPHIC tm2321901d2_ex5-1img02.jpg GRAPHIC 4525
9 GRAPHIC tm2321901d2_ex5-1img03.jpg GRAPHIC 1502
  Complete submission text file 0001104659-23-087226.txt   770287
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-3ASR | Act: 33 | File No.: 333-273639 | Film No.: 231139542
SIC: 3559 Special Industry Machinery, NEC