Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-23-039635
Filing Date
2023-03-31
Accepted
2023-03-31 08:00:51
Documents
23

Document Format Files

Seq Description Document Type Size
1 FORM DEF 14A tm231852d2_def14a.htm   iXBRL DEF 14A 969701
6 GRAPHIC bc_ceo-4c.jpg GRAPHIC 97069
7 GRAPHIC bc_neo-4c.jpg GRAPHIC 135453
8 GRAPHIC fc_committe-4c.jpg GRAPHIC 186986
9 GRAPHIC ic_tickmark-bw.jpg GRAPHIC 1486
10 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 24832
11 GRAPHIC pc_boardind-4c.jpg GRAPHIC 84217
12 GRAPHIC pc_nominees-4c.jpg GRAPHIC 94962
13 GRAPHIC px_proxypg1-4c.jpg GRAPHIC 1061254
14 GRAPHIC px_proxypg2-4c.jpg GRAPHIC 678217
  Complete submission text file 0001104659-23-039635.txt   7231537

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20221231.xsd EX-101.SCH 5176
3 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE acls-20221231_def.xml EX-101.DEF 4886
4 XBRL TAXONOMY EXTENSION LABEL LINKBASE acls-20221231_lab.xml EX-101.LAB 5923
5 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE acls-20221231_pre.xml EX-101.PRE 7163
17 EXTRACTED XBRL INSTANCE DOCUMENT tm231852d2_def14a_htm.xml XML 187206
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 23783308
SIC: 3559 Special Industry Machinery, NEC