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Form SD - Specialized disclosure report:
SEC Accession No. 0001104659-22-063116
Filing Date
2022-05-20
Accepted
2022-05-20 06:57:37
Documents
2

Document Format Files

Seq Description Document Type Size
1 SD tm2215963d1_sd.htm SD 21594
2 EXHIBIT 1.01 tm2215963d1_ex1-01.htm EX-1.01 18635
  Complete submission text file 0001104659-22-063116.txt   41419
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SD | Act: 34 | File No.: 000-30941 | Film No.: 22945268
SIC: 3559 Special Industry Machinery, NEC