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Filing Detail
Form S-8 - Securities to be offered to employees in employee benefit plans:
SEC Accession No. 0001104659-20-067500
Filing Date
2020-05-29
Accepted
2020-05-29 12:10:07
Documents
6
Effectiveness Date
2020-05-29

Document Format Files

Seq Description Document Type Size
1 S-8 tm2020919d1_s8.htm S-8 56506
2 EXHIBIT-5.1 tm2020919d1_ex5-1.htm EX-5.1 11747
3 EXHIBIT 23.2 tm2020919d1_ex23-2.htm EX-23.2 2470
4 EXHIBIT 99.1 tm2020919d1_ex99-1.htm EX-99.1 51463
5 GRAPHIC tm2020919d1_ex5-1img01.jpg GRAPHIC 2277
6 GRAPHIC tm2020919d1_ex5-1img02.jpg GRAPHIC 2311
  Complete submission text file 0001104659-20-067500.txt   129915
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-8 | Act: 33 | File No.: 333-238770 | Film No.: 20925471
SIC: 3559 Special Industry Machinery, NEC