Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-15-034879
Filing Date
2015-05-06
Accepted
2015-05-06 16:14:21
Documents
12
Period of Report
2015-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a15-6960_110q.htm 10-Q 685379
2 10-Q PDF a15-6960_110q.pdf 10-Q 280308
3 EX-31.1 a15-6960_1ex31d1.htm EX-31.1 10975
4 EX-31.2 a15-6960_1ex31d2.htm EX-31.2 11022
5 EX-32.1 a15-6960_1ex32d1.htm EX-32.1 5196
6 EX-32.2 a15-6960_1ex32d2.htm EX-32.2 5207
  Complete submission text file 0001104659-15-034879.txt   4169202

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20150331.xml EX-101.INS 413667
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20150331.xsd EX-101.SCH 25961
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20150331_cal.xml EX-101.CAL 50467
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20150331_lab.xml EX-101.LAB 296211
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20150331_pre.xml EX-101.PRE 209167
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20150331_def.xml EX-101.DEF 83569
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 15837145
SIC: 3559 Special Industry Machinery, NEC