Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-14-077729
Filing Date
2014-11-06
Accepted
2014-11-06 16:27:25
Documents
16
Period of Report
2014-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a14-19633_110q.htm 10-Q 929163
2 10-Q PDF a14-19633_110q.pdf 10-Q 172051
3 EX-2.1 a14-19633_1ex2d1.htm EX-2.1 649737
4 EX-10.1 a14-19633_1ex10d1.htm EX-10.1 12655
5 EX-10.2 a14-19633_1ex10d2.htm EX-10.2 33471
6 EX-10.3 a14-19633_1ex10d3.htm EX-10.3 47517
7 EX-31.1 a14-19633_1ex31d1.htm EX-31.1 12500
8 EX-31.2 a14-19633_1ex31d2.htm EX-31.2 12545
9 EX-32.1 a14-19633_1ex32d1.htm EX-32.1 4744
10 EX-32.2 a14-19633_1ex32d2.htm EX-32.2 4756
  Complete submission text file 0001104659-14-077729.txt   4955039

Data Files

Seq Description Document Type Size
11 XBRL INSTANCE DOCUMENT acls-20140930.xml EX-101.INS 460991
12 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20140930.xsd EX-101.SCH 25624
13 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20140930_cal.xml EX-101.CAL 49061
14 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20140930_lab.xml EX-101.LAB 301192
15 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20140930_pre.xml EX-101.PRE 201278
16 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20140930_def.xml EX-101.DEF 77943
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 141201065
SIC: 3559 Special Industry Machinery, NEC