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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-14-036345
Filing Date
2014-05-08
Accepted
2014-05-08 13:10:59
Documents
11
Period of Report
2014-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a14-8383_110q.htm 10-Q 666335
2 EX-31.1 a14-8383_1ex31d1.htm EX-31.1 11008
3 EX-31.2 a14-8383_1ex31d2.htm EX-31.2 11106
4 EX-32.1 a14-8383_1ex32d1.htm EX-32.1 5196
5 EX-32.2 a14-8383_1ex32d2.htm EX-32.2 5207
  Complete submission text file 0001104659-14-036345.txt   5198851

Data Files

Seq Description Document Type Size
6 XBRL INSTANCE DOCUMENT acls-20140331.xml EX-101.INS 391140
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20140331.xsd EX-101.SCH 75403
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20140331_cal.xml EX-101.CAL 56116
9 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20140331_lab.xml EX-101.LAB 1233646
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20140331_pre.xml EX-101.PRE 595862
11 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20140331_def.xml EX-101.DEF 314654
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 14824031
SIC: 3559 Special Industry Machinery, NEC