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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-11-044192
Filing Date
2011-08-05
Accepted
2011-08-05 14:00:07
Documents
11
Period of Report
2011-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q a11-13839_110q.htm 10-Q 499274
2 EX-31.1 a11-13839_1ex31d1.htm EX-31.1 13753
3 EX-31.2 a11-13839_1ex31d2.htm EX-31.2 14180
4 EX-32.1 a11-13839_1ex32d1.htm EX-32.1 5779
5 EX-32.2 a11-13839_1ex32d2.htm EX-32.2 5778
  Complete submission text file 0001104659-11-044192.txt   2014133

Data Files

Seq Description Document Type Size
6 XBRL INSTANCE DOCUMENT acls-20110630.xml EX-101.INS 178989
7 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20110630.xsd EX-101.SCH 12807
8 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20110630_cal.xml EX-101.CAL 36848
9 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20110630_lab.xml EX-101.LAB 206391
10 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20110630_pre.xml EX-101.PRE 102811
11 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20110630_def.xml EX-101.DEF 70532
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 111013623
SIC: 3559 Special Industry Machinery, NEC