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Filing Detail
Form ARS - Annual Report to Security Holders:
SEC Accession No. 0001104659-23-039637
Filing Date
2023-03-31
Accepted
2023-03-31 08:01:50
Documents
1
Period of Report
2022-12-31
Effectiveness Date
2023-03-31

Document Format Files

Seq Description Document Type Size
1 ARS tm238093d2_ars.pdf ARS 284517
  Complete submission text file 0001104659-23-039637.txt   393155
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 23783318
SIC: 3559 Special Industry Machinery, NEC