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Filing Detail
Form SC 13G/A - Statement of acquisition of beneficial ownership by individuals: [Amend]
SEC Accession No. 0001104659-21-021536
Filing Date
2021-02-12
Accepted
2021-02-12 12:02:06
Documents
1

Document Format Files

Seq Description Document Type Size
1 SC 13G/A tm214754d25_sc13ga.htm SC 13G/A 48215
  Complete submission text file 0001104659-21-021536.txt   49758
Mailing Address 177 EAST COLORADO BLVD. 11TH FLOOR PASADENA CA 91105
Business Address 177 EAST COLORADO BLVD. 11TH FLOOR PASADENA CA 91105 6263049222
PRIMECAP MANAGEMENT CO/CA/ (Filed by) CIK: 0000763212 (see all company filings)

IRS No.: 953868081
Type: SC 13G/A

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Subject) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SC 13G/A | Act: 34 | File No.: 005-60443 | Film No.: 21624612
SIC: 3559 Special Industry Machinery, NEC