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Filing Detail
Form PRE 14A - Other preliminary proxy statements:
SEC Accession No. 0001047469-16-010560
Filing Date
2016-02-29
Accepted
2016-02-29 11:08:00
Documents
14
Period of Report
2016-04-04

Document Format Files

Seq Description Document Type Size
1 PRE 14A a2227385zpre14a.htm PRE 14A 702021
2 G147595.JPG g147595.jpg GRAPHIC 6261
3 G225777.JPG g225777.jpg GRAPHIC 27387
4 G645524.JPG g645524.jpg GRAPHIC 67111
5 G660872.JPG g660872.jpg GRAPHIC 40713
6 G570541.JPG g570541.jpg GRAPHIC 38502
7 G965828.JPG g965828.jpg GRAPHIC 52891
8 G403730.JPG g403730.jpg GRAPHIC 53273
9 G567670.JPG g567670.jpg GRAPHIC 79026
10 G315919.JPG g315919.jpg GRAPHIC 45813
11 G18360.JPG g18360.jpg GRAPHIC 42915
12 G175216.JPG g175216.jpg GRAPHIC 80175
13 G23482BEI001.GIF g23482bei001.gif GRAPHIC 119088
14 G23482BEI002.GIF g23482bei002.gif GRAPHIC 64734
  Complete submission text file 0001047469-16-010560.txt   1693576
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: PRE 14A | Act: 34 | File No.: 000-30941 | Film No.: 161465539
SIC: 3559 Special Industry Machinery, NEC