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Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-13-002045
Filing Date
2013-03-01
Accepted
2013-03-01 13:44:06
Documents
16
Period of Report
2012-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2213243z10-k.htm 10-K 960642
2 EX-10.12 a2213243zex-10_12.htm EX-10.12 11143
3 EX-10.13 a2213243zex-10_13.htm EX-10.13 11844
4 EX-10.17 a2213243zex-10_17.htm EX-10.17 7177
5 EX-21.1 a2213243zex-21_1.htm EX-21.1 5423
6 EX-23.1 a2213243zex-23_1.htm EX-23.1 3935
7 EX-31.1 a2213243zex-31_1.htm EX-31.1 8030
8 EX-31.2 a2213243zex-31_2.htm EX-31.2 7670
9 EX-32.1 a2213243zex-32_1.htm EX-32.1 3985
10 EX-32.2 a2213243zex-32_2.htm EX-32.2 4347
  Complete submission text file 0001047469-13-002045.txt   8401701

Data Files

Seq Description Document Type Size
11 EX-101.INS acls-20121231.xml EX-101.INS 1093465
12 EX-101.SCH acls-20121231.xsd EX-101.SCH 67528
13 EX-101.CAL acls-20121231_cal.xml EX-101.CAL 102491
14 EX-101.LAB acls-20121231_lab.xml EX-101.LAB 1129996
15 EX-101.PRE acls-20121231_pre.xml EX-101.PRE 549814
16 EX-101.DEF acls-20121231_def.xml EX-101.DEF 262395
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 13656218
SIC: 3559 Special Industry Machinery, NEC
Assistant Director 10