Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-10-002596
Filing Date
2010-03-23
Accepted
2010-03-23 11:42:25
Documents
5
Period of Report
2010-05-07
Effectiveness Date
2010-03-23

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2197206zdef14a.htm DEF 14A 471576
2 G471830.JPG g471830.jpg GRAPHIC 13748
3 G613348.JPG g613348.jpg GRAPHIC 5621
4 G364162BAI001.GIF g364162bai001.gif GRAPHIC 68161
5 G364162BAI002.GIF g364162bai002.gif GRAPHIC 70298
  Complete submission text file 0001047469-10-002596.txt   691167
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 10698415
SIC: 3559 Special Industry Machinery, NEC