Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-09-003726
Filing Date
2009-04-02
Accepted
2009-04-02 15:36:08
Documents
5
Period of Report
2009-05-06
Effectiveness Date
2009-04-02

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2191507zdef14a.htm DEF 14A 442415
2 G20052BCI001.GIF g20052bci001.gif GRAPHIC 70995
3 G20052BCI002.GIF g20052bci002.gif GRAPHIC 72110
4 G471830.JPG g471830.jpg GRAPHIC 13748
5 G613348.JPG g613348.jpg GRAPHIC 5621
  Complete submission text file 0001047469-09-003726.txt   668398
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 09727347
SIC: 3559 Special Industry Machinery, NEC