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Filing Detail
Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-21-000721
Filing Date
2021-03-25
Accepted
2021-03-25 08:56:50
Documents
11
Period of Report
2021-05-12

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2242987zdef14a.htm DEF 14A 510787
2 G147595.JPG g147595.jpg GRAPHIC 6261
3 G999.JPG g999.jpg GRAPHIC 42527
4 G252200.JPG g252200.jpg GRAPHIC 54019
5 G400732.JPG g400732.jpg GRAPHIC 38412
6 G867423.JPG g867423.jpg GRAPHIC 55851
7 G501094.JPG g501094.jpg GRAPHIC 73296
8 G906461.JPG g906461.jpg GRAPHIC 45327
9 G505849.JPG g505849.jpg GRAPHIC 48372
10 G23932BGI001.GIF g23932bgi001.gif GRAPHIC 112417
11 G23932BGI002.GIF g23932bgi002.gif GRAPHIC 76741
  Complete submission text file 0001047469-21-000721.txt   1274799
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 21770275
SIC: 3559 Special Industry Machinery, NEC