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Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001047469-14-002919
Filing Date
2014-03-25
Accepted
2014-03-25 11:43:25
Documents
5
Period of Report
2014-05-13
Effectiveness Date
2014-03-25

Document Format Files

Seq Description Document Type Size
1 DEF 14A a2218775zdef14a.htm DEF 14A 592449
2 G471830.JPG g471830.jpg GRAPHIC 13748
3 G613348.JPG g613348.jpg GRAPHIC 5621
4 G22982BII001.GIF g22982bii001.gif GRAPHIC 110770
5 G22982BII002.GIF g22982bii002.gif GRAPHIC 66932
  Complete submission text file 0001047469-14-002919.txt   865690
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 14715015
SIC: 3559 Special Industry Machinery, NEC