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Filing Detail
Form SC 13G - Statement of acquisition of beneficial ownership by individuals:
SEC Accession No. 0000932471-02-000276
Filing Date
2002-02-12
Accepted
2002-02-12 00:00:00
Documents
1

Document Format Files

Seq Description Document Type Size
1 AXCELIS TECHNOLOGIES, INC. axcelistechinc.txt SC 13G 6007
  Complete submission text file 0000932471-02-000276.txt   8325
Mailing Address PO BOX 2600 V37 VALLEY FORGE PA 19482
Business Address PO BOX 2600 V37 VALLEY FORGE PA 19482 6106696289
VANGUARD WINDSOR FUNDS/ (Filed by) CIK: 0000107606 (see all company filings)

IRS No.: 510082711 | State of Incorp.: DE | Fiscal Year End: 1031

Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Subject) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: SC 13G | Act: 34 | File No.: 005-60443 | Film No.: 02535965
SIC: 3559 Special Industry Machinery, NEC