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Filing Detail
Form 424B3 - Prospectus [Rule 424(b)(3)]:
SEC Accession No. 0000927016-02-004471
Filing Date
2002-09-06
Accepted
2002-09-06 14:23:59
Documents
1

Document Format Files

Seq Description Document Type Size
1 PROSPECTUS SUPPLEMENT d424b3.txt 424B3 4548
  Complete submission text file 0000927016-02-004471.txt   6001
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 424B3 | Act: 33 | File No.: 333-85214 | Film No.: 02758378
SIC: 3559 Special Industry Machinery, NEC