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Filing Detail
Form S-3/A - Registration statement under Securities Act of 1933: [Amend]
SEC Accession No. 0000927016-02-002980
Filing Date
2002-05-21
Accepted
2002-05-21 14:46:41
Documents
3

Document Format Files

Seq Description Document Type Size
1 AMENDMENT #1 TO FORM S-3 ds3a.txt S-3/A 115953
3 COMPUTATION OF RATIO OF EARNINGS dex12.txt EX-12 3254
4 CONSENT OF ERNST & YOUNG LLP dex231.txt EX-23.1 721
  Complete submission text file 0000927016-02-002980.txt   121637
Mailing Address
Business Address 55 CHERRY HILL DRIVE BEVERLY MA 01915 9782324001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-3/A | Act: 33 | File No.: 333-85214 | Film No.: 02658812
SIC: 3559 Special Industry Machinery, NEC