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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001564590-21-053711
Filing Date
2021-11-03
Accepted
2021-11-03 06:04:28
Documents
116
Period of Report
2021-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q mksi-10q_20210930.htm   iXBRL 10-Q 4598560
2 EX-31.1 mksi-ex311_16.htm EX-31.1 17943
3 EX-31.2 mksi-ex312_15.htm EX-31.2 17759
4 EX-32.1 mksi-ex321_14.htm EX-32.1 11155
  Complete submission text file 0001564590-21-053711.txt   19205977

Data Files

Seq Description Document Type Size
5 XBRL TAXONOMY EXTENSION SCHEMA mksi-20210930.xsd EX-101.SCH 86661
6 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE mksi-20210930_cal.xml EX-101.CAL 83422
7 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE mksi-20210930_def.xml EX-101.DEF 325411
8 XBRL TAXONOMY EXTENSION LABEL LINKBASE mksi-20210930_lab.xml EX-101.LAB 601773
9 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE mksi-20210930_pre.xml EX-101.PRE 535824
10 EXTRACTED XBRL INSTANCE DOCUMENT mksi-10q_20210930_htm.xml XML 5202116
Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

IRS No.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-23621 | Film No.: 211373576
SIC: 3823 Industrial Instruments For Measurement, Display, and Control
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