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Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001564590-21-007630
Filing Date
2021-02-23
Accepted
2021-02-23 17:04:32
Documents
158
Period of Report
2020-12-31

Document Format Files

Seq Description Document Type Size
1 10-K mksi-10k_20201231.htm   iXBRL 10-K 6624773
2 EX-10.36 mksi-ex1036_271.htm EX-10.36 72237
3 EX-10.37 mksi-ex1037_269.htm EX-10.37 82680
4 EX-10.38 mksi-ex1038_270.htm EX-10.38 88358
5 EX-21.1 mksi-ex211_117.htm EX-21.1 29486
6 EX-23.1 mksi-ex231_173.htm EX-23.1 2567
7 EX-31.1 mksi-ex311_78.htm EX-31.1 16635
8 EX-31.2 mksi-ex312_76.htm EX-31.2 16647
9 EX-32.1 mksi-ex321_77.htm EX-32.1 10350
10 GRAPHIC gnwnkq4kmw4u000001.jpg GRAPHIC 169217
  Complete submission text file 0001564590-21-007630.txt   28618707

Data Files

Seq Description Document Type Size
11 XBRL TAXONOMY EXTENSION SCHEMA mksi-20201231.xsd EX-101.SCH 137639
12 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE mksi-20201231_cal.xml EX-101.CAL 118013
13 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE mksi-20201231_def.xml EX-101.DEF 510785
14 XBRL TAXONOMY EXTENSION LABEL LINKBASE mksi-20201231_lab.xml EX-101.LAB 962849
15 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE mksi-20201231_pre.xml EX-101.PRE 832387
16 EXTRACTED XBRL INSTANCE DOCUMENT mksi-10k_20201231_htm.xml XML 7402909
Mailing Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810
Business Address 2 TECH DRIVE SUITE 201 ANDOVER MA 01810 978-645-5500
MKS INSTRUMENTS INC (Filer) CIK: 0001049502 (see all company filings)

IRS No.: 042277512 | State of Incorp.: MA | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-23621 | Film No.: 21666629
SIC: 3823 Industrial Instruments For Measurement, Display, and Control
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