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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-007307
Filing Date
2022-05-05
Accepted
2022-05-05 14:07:09
Documents
69
Period of Report
2022-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20220331x10q.htm   iXBRL 10-Q 1435778
2 EX-31.1 acls-20220331xex31d1.htm EX-31.1 12609
3 EX-31.2 acls-20220331xex31d2.htm EX-31.2 13050
4 EX-32.1 acls-20220331xex32d1.htm EX-32.1 6835
5 EX-32.2 acls-20220331xex32d2.htm EX-32.2 6061
  Complete submission text file 0001558370-22-007307.txt   6043877

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20220331.xsd EX-101.SCH 39627
7 EX-101.CAL acls-20220331_cal.xml EX-101.CAL 67860
8 EX-101.DEF acls-20220331_def.xml EX-101.DEF 145939
9 EX-101.LAB acls-20220331_lab.xml EX-101.LAB 378753
10 EX-101.PRE acls-20220331_pre.xml EX-101.PRE 267790
63 EXTRACTED XBRL INSTANCE DOCUMENT acls-20220331x10q_htm.xml XML 1078780
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 22895465
SIC: 3559 Special Industry Machinery, NEC