SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001558370-22-002096
Filing Date
2022-02-25
Accepted
2022-02-25 12:41:09
Documents
99
Period of Report
2021-12-31

Document Format Files

Seq Description Document Type Size
1 10-K acls-20211231x10k.htm   iXBRL 10-K 2683583
2 EX-10.8 acls-20211231xex10d8.htm EX-10.8 18065
3 EX-10.9 acls-20211231xex10d9.htm EX-10.9 13624
4 EX-21.1 acls-20211231xex21d1.htm EX-21.1 7091
5 EX-23.1 acls-20211231xex23d1.htm EX-23.1 6683
6 EX-31.1 acls-20211231xex31d1.htm EX-31.1 13228
7 EX-31.2 acls-20211231xex31d2.htm EX-31.2 14259
8 EX-32.1 acls-20211231xex32d1.htm EX-32.1 5380
9 EX-32.2 acls-20211231xex32d2.htm EX-32.2 7538
  Complete submission text file 0001558370-22-002096.txt   11829727

Data Files

Seq Description Document Type Size
10 EX-101.SCH acls-20211231.xsd EX-101.SCH 66926
11 EX-101.CAL acls-20211231_cal.xml EX-101.CAL 97971
12 EX-101.DEF acls-20211231_def.xml EX-101.DEF 251432
13 EX-101.LAB acls-20211231_lab.xml EX-101.LAB 687497
14 EX-101.PRE acls-20211231_pre.xml EX-101.PRE 487376
93 EXTRACTED XBRL INSTANCE DOCUMENT acls-20211231x10k_htm.xml XML 2527521
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 22677338
SIC: 3559 Special Industry Machinery, NEC