SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-014801
Filing Date
2021-11-05
Accepted
2021-11-05 14:04:50
Documents
71
Period of Report
2021-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20210930x10q.htm   iXBRL 10-Q 2059413
2 EX-31.1 acls-20210930xex31d1.htm EX-31.1 12615
3 EX-31.2 acls-20210930xex31d2.htm EX-31.2 13056
4 EX-32.1 acls-20210930xex32d1.htm EX-32.1 6841
5 EX-32.2 acls-20210930xex32d2.htm EX-32.2 6067
  Complete submission text file 0001558370-21-014801.txt   7193993

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20210930.xsd EX-101.SCH 40517
7 EX-101.CAL acls-20210930_cal.xml EX-101.CAL 68250
8 EX-101.DEF acls-20210930_def.xml EX-101.DEF 121781
9 EX-101.LAB acls-20210930_lab.xml EX-101.LAB 397524
10 EX-101.PRE acls-20210930_pre.xml EX-101.PRE 278241
11 EXTRACTED XBRL INSTANCE DOCUMENT acls-20210930x10q_htm.xml XML 1361877
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 211383832
SIC: 3559 Special Industry Machinery, NEC