SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-010725
Filing Date
2021-08-06
Accepted
2021-08-06 10:52:40
Documents
71
Period of Report
2021-06-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20210630x10q.htm   iXBRL 10-Q 1960665
2 EX-31.1 acls-20210630xex31d1.htm EX-31.1 12612
3 EX-31.2 acls-20210630xex31d2.htm EX-31.2 13053
4 EX-32.1 acls-20210630xex32d1.htm EX-32.1 6838
5 EX-32.2 acls-20210630xex32d2.htm EX-32.2 6064
  Complete submission text file 0001558370-21-010725.txt   7055931

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20210630.xsd EX-101.SCH 41222
7 EX-101.CAL acls-20210630_cal.xml EX-101.CAL 68248
8 EX-101.DEF acls-20210630_def.xml EX-101.DEF 124857
9 EX-101.LAB acls-20210630_lab.xml EX-101.LAB 404067
10 EX-101.PRE acls-20210630_pre.xml EX-101.PRE 281561
11 EXTRACTED XBRL INSTANCE DOCUMENT acls-20210630x10q_htm.xml XML 1328607
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 211151381
SIC: 3559 Special Industry Machinery, NEC