SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001558370-21-001972
Filing Date
2021-02-26
Accepted
2021-02-26 14:06:44
Documents
101
Period of Report
2020-12-31

Document Format Files

Seq Description Document Type Size
1 10-K acls-20201231x10k.htm   iXBRL 10-K 2666577
2 EX-10.11 acls-20201231xex10d11.htm EX-10.11 18057
3 EX-10.12 acls-20201231xex10d12.htm EX-10.12 13463
4 EX-21.1 acls-20201231xex21d1.htm EX-21.1 7090
5 EX-23.1 acls-20201231xex23d1.htm EX-23.1 7628
6 EX-31.1 acls-20201231xex31d1.htm EX-31.1 13227
7 EX-31.2 acls-20201231xex31d2.htm EX-31.2 14258
8 EX-32.1 acls-20201231xex32d1.htm EX-32.1 5379
9 EX-32.2 acls-20201231xex32d2.htm EX-32.2 7537
  Complete submission text file 0001558370-21-001972.txt   11913817

Data Files

Seq Description Document Type Size
10 EX-101.SCH acls-20201231.xsd EX-101.SCH 69869
11 EX-101.CAL acls-20201231_cal.xml EX-101.CAL 95955
12 EX-101.DEF acls-20201231_def.xml EX-101.DEF 257696
13 EX-101.LAB acls-20201231_lab.xml EX-101.LAB 717928
14 EX-101.PRE acls-20201231_pre.xml EX-101.PRE 522813
15 EXTRACTED XBRL INSTANCE DOCUMENT acls-20201231x10k_htm.xml XML 2581339
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 21687195
SIC: 3559 Special Industry Machinery, NEC