SEC Seal
SEC Banner
Search the Next-Generation EDGAR System
Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-16-118129
Filing Date
2016-05-05
Accepted
2016-05-05 12:02:15
Documents
52
Period of Report
2016-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a16-6510_110q.htm 10-Q 652043
2 10-Q PDF a16-6510_110q.pdf 10-Q 662732
3 EX-31.1 a16-6510_1ex31d1.htm EX-31.1 10628
4 EX-31.2 a16-6510_1ex31d2.htm EX-31.2 10650
5 EX-32.1 a16-6510_1ex32d1.htm EX-32.1 5046
6 EX-32.2 a16-6510_1ex32d2.htm EX-32.2 5067
  Complete submission text file 0001104659-16-118129.txt   3614015

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20160331.xml EX-101.INS 454509
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20160331.xsd EX-101.SCH 20927
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20160331_cal.xml EX-101.CAL 47497
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20160331_lab.xml EX-101.LAB 251724
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20160331_pre.xml EX-101.PRE 165193
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20160331_def.xml EX-101.DEF 44805
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 161622519
SIC: 3559 Special Industry Machinery, NEC