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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-15-076156
Filing Date
2015-11-05
Accepted
2015-11-05 13:17:59
Documents
12
Period of Report
2015-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a15-17834_110q.htm 10-Q 912533
2 10-Q PDF a15-17834_110q.pdf 10-Q 680444
3 EX-31.1 a15-17834_1ex31d1.htm EX-31.1 11787
4 EX-31.2 a15-17834_1ex31d2.htm EX-31.2 11811
5 EX-32.1 a15-17834_1ex32d1.htm EX-32.1 4711
6 EX-32.2 a15-17834_1ex32d2.htm EX-32.2 4726
  Complete submission text file 0001104659-15-076156.txt   4516216

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20150930.xml EX-101.INS 598077
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20150930.xsd EX-101.SCH 26283
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20150930_cal.xml EX-101.CAL 51491
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20150930_lab.xml EX-101.LAB 305339
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20150930_pre.xml EX-101.PRE 213979
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20150930_def.xml EX-101.DEF 84036
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 151199776
SIC: 3559 Special Industry Machinery, NEC