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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-13-082657
Filing Date
2013-11-08
Accepted
2013-11-08 11:21:17
Documents
12
Period of Report
2013-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a13-19474_110q.htm 10-Q 913787
2 EX-10.4 a13-19474_1ex10d4.htm EX-10.4 410894
3 EX-31.1 a13-19474_1ex31d1.htm EX-31.1 10847
4 EX-31.2 a13-19474_1ex31d2.htm EX-31.2 10892
5 EX-32.1 a13-19474_1ex32d1.htm EX-32.1 5204
6 EX-32.2 a13-19474_1ex32d2.htm EX-32.2 5215
  Complete submission text file 0001104659-13-082657.txt   5734235

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20130930.xml EX-101.INS 429648
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20130930.xsd EX-101.SCH 71225
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20130930_cal.xml EX-101.CAL 54044
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20130930_lab.xml EX-101.LAB 1108730
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20130930_pre.xml EX-101.PRE 526787
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20130930_def.xml EX-101.DEF 259433
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 131203188
SIC: 3559 Special Industry Machinery, NEC