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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-12-074161
Filing Date
2012-11-05
Accepted
2012-11-05 15:29:58
Documents
12
Period of Report
2012-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q a12-19051_110q.htm 10-Q 515404
2 EX-10.1 a12-19051_1ex10d1.htm EX-10.1 57954
3 EX-31.1 a12-19051_1ex31d1.htm EX-31.1 13512
4 EX-31.2 a12-19051_1ex31d2.htm EX-31.2 13475
5 EX-32.1 a12-19051_1ex32d1.htm EX-32.1 5194
6 EX-32.2 a12-19051_1ex32d2.htm EX-32.2 5193
  Complete submission text file 0001104659-12-074161.txt   3090730

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20120930.xml EX-101.INS 296627
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20120930.xsd EX-101.SCH 31439
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20120930_cal.xml EX-101.CAL 46948
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20120930_lab.xml EX-101.LAB 435120
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20120930_pre.xml EX-101.PRE 207084
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20120930_def.xml EX-101.DEF 112068
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 121179932
SIC: 3559 Special Industry Machinery, NEC