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Filing Detail
Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-12-033183
Filing Date
2012-05-04
Accepted
2012-05-04 15:47:36
Documents
12
Period of Report
2012-03-31

Document Format Files

Seq Description Document Type Size
1 10-Q a12-7932_110q.htm 10-Q 423707
2 EX-10.1 a12-7932_1ex10d1.htm EX-10.1 79771
3 EX-31.1 a12-7932_1ex31d1.htm EX-31.1 13556
4 EX-31.2 a12-7932_1ex31d2.htm EX-31.2 13552
5 EX-32.1 a12-7932_1ex32d1.htm EX-32.1 5189
6 EX-32.2 a12-7932_1ex32d2.htm EX-32.2 5195
  Complete submission text file 0001104659-12-033183.txt   2113003

Data Files

Seq Description Document Type Size
7 XBRL INSTANCE DOCUMENT acls-20120331.xml EX-101.INS 138855
8 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT acls-20120331.xsd EX-101.SCH 21316
9 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT acls-20120331_cal.xml EX-101.CAL 50433
10 XBRL TAXONOMY EXTENSION LABELS LINKBASE DOCUMENT acls-20120331_lab.xml EX-101.LAB 309087
11 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT acls-20120331_pre.xml EX-101.PRE 148907
12 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT acls-20120331_def.xml EX-101.DEF 90404
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978 232 4001
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 12814145
SIC: 3559 Special Industry Machinery, NEC