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Filing Detail
Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001047469-16-010788
Filing Date
2016-03-04
Accepted
2016-03-04 16:55:38
Documents
94
Period of Report
2015-12-31

Document Format Files

Seq Description Document Type Size
1 10-K a2227592z10-k.htm 10-K 1331260
2 10-K a2227592zf1_10-03.pdf 10-K 196096
3 EX-10.12 a2227592zex-10_12.htm EX-10.12 10696
4 EX-10.13 a2227592zex-10_13.htm EX-10.13 11286
5 EX-21.1 a2227592zex-21_1.htm EX-21.1 4638
6 EX-23.1 a2227592zex-23_1.htm EX-23.1 4386
7 EX-31.1 a2227592zex-31_1.htm EX-31.1 8156
8 EX-31.2 a2227592zex-31_2.htm EX-31.2 8174
9 EX-32.1 a2227592zex-32_1.htm EX-32.1 4437
10 EX-32.2 a2227592zex-32_2.htm EX-32.2 4463
  Complete submission text file 0001047469-16-010788.txt   9840911

Data Files

Seq Description Document Type Size
11 EX-101.INS acls-20151231.xml EX-101.INS 2646039
12 EX-101.SCH acls-20151231.xsd EX-101.SCH 61785
13 EX-101.CAL acls-20151231_cal.xml EX-101.CAL 81458
14 EX-101.LAB acls-20151231_lab.xml EX-101.LAB 679412
15 EX-101.PRE acls-20151231_pre.xml EX-101.PRE 488914
16 EX-101.DEF acls-20151231_def.xml EX-101.DEF 229863
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

IRS No.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-30941 | Film No.: 161485924
SIC: 3559 Special Industry Machinery, NEC