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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0001558370-22-001461
Filing Date
2022-02-18
Accepted
2022-02-18 16:58:44
Documents
127
Period of Report
2021-12-31

Document Format Files

Seq Description Document Type Size
1 10-K veco-20211231x10k.htm   iXBRL 10-K 3333623
2 EX-21.1 veco-20211231xex21d1.htm EX-21.1 25367
3 EX-23.1 veco-20211231xex23d1.htm EX-23.1 14476
4 EX-31.1 veco-20211231xex31d1.htm EX-31.1 16232
5 EX-31.2 veco-20211231xex31d2.htm EX-31.2 16163
6 EX-32.1 veco-20211231xex32d1.htm EX-32.1 7893
7 EX-32.2 veco-20211231xex32d2.htm EX-32.2 7905
8 GRAPHIC veco-20211231x10k004.jpg GRAPHIC 46713
9 GRAPHIC veco-20211231x10k005.jpg GRAPHIC 12013
  Complete submission text file 0001558370-22-001461.txt   14611795

Data Files

Seq Description Document Type Size
10 EX-101.SCH veco-20211231.xsd EX-101.SCH 82535
11 EX-101.CAL veco-20211231_cal.xml EX-101.CAL 109930
12 EX-101.DEF veco-20211231_def.xml EX-101.DEF 324463
13 EX-101.LAB veco-20211231_lab.xml EX-101.LAB 824963
14 EX-101.PRE veco-20211231_pre.xml EX-101.PRE 633274
121 EXTRACTED XBRL INSTANCE DOCUMENT veco-20211231x10k_htm.xml XML 3030346
Mailing Address TERMINAL DRIVE PLAINVIEW NY 11803
Business Address TERMINAL DRIVE PLAINVIEW NY 11803 516 677-0200
VEECO INSTRUMENTS INC (Filer) CIK: 0000103145 (see all company filings)

IRS No.: 112989601 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-16244 | Film No.: 22653634
SIC: 3559 Special Industry Machinery, NEC
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