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Form 10-K - Annual report [Section 13 and 15(d), not S-K Item 405]:
SEC Accession No. 0000928421-13-000027
Filing Date
2013-03-15
Accepted
2013-03-15 17:25:57
Documents
18
Period of Report
2012-12-31

Document Format Files

Seq Description Document Type Size
1 10-K mtsn201210k.htm 10-K 1794203
2 SEVERANCE AND EXECUTIVE CHANGE OF CONTROL AGREEMENT FOR FUSEN E. CHEN mtsn20121231-ex1015.htm EX-10.15 50015
3 OFFER LETTER BETWEEN MATTSON TECHNOLOGY, INC. AND FUSEN E. CHEN mtsn20121231-ex1016.htm EX-10.16 27561
4 SUBSIDIARIES OF REGISTRANT. mtsn20121231-ex211.htm EX-21.1 4769
5 CONSENT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM mtsn20121231-ex231.htm EX-23.1 3276
6 CERTIFICATION OF CHIEF EXECUTIVE OFFICER mtsn20121231-ex311.htm EX-31.1 12194
7 CERTIFICATION OF CHIEF FINANCIAL OFFICER mtsn20121231-ex312.htm EX-31.2 11715
8 CERTIFICATION OF CHIEF EXECUTIVE OFFICER mtsn20121231-ex321.htm EX-32.1 5855
9 CERTIFICATION OF CHIEF FINANCIAL OFFICER mtsn20123112-ex322.htm EX-32.2 6338
16 mtsn201210kchart.jpg GRAPHIC 319872
17 mtsnletterhead.jpg GRAPHIC 34062
18 prlogoa01.jpg GRAPHIC 15912
  Complete submission text file 0000928421-13-000027.txt   11217931

Data Files

Seq Description Document Type Size
10 XBRL INSTANCE DOCUMENT mtsn-20121231.xml EX-101.INS 1606899
11 XBRL TAXONOMY EXTENSION SCHEMA DOCUMENT mtsn-20121231.xsd EX-101.SCH 61334
12 XBRL TAXONOMY EXTENSION CALCULATION LINKBASE DOCUMENT mtsn-20121231_cal.xml EX-101.CAL 107745
13 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE DOCUMENT mtsn-20121231_def.xml EX-101.DEF 359017
14 XBRL TAXONOMY EXTENSION LABEL LINKBASE DOCUMENT mtsn-20121231_lab.xml EX-101.LAB 870101
15 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE DOCUMENT mtsn-20121231_pre.xml EX-101.PRE 503511
Mailing Address 47131 BAYSIDE PARKWAY FREMONT CA 94538
Business Address 47131 BAYSIDE PARKWAY FREMONT CA 94538 510 657 5900
MATTSON TECHNOLOGY INC (Filer) CIK: 0000928421 (see all company filings)

IRS No.: 770208119 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K | Act: 34 | File No.: 000-24838 | Film No.: 13695275
SIC: 3559 Special Industry Machinery, NEC