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Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC CIK#: 0001113232 (see all company filings)

SIC: 3559 - SPECIAL INDUSTRY MACHINERY, NEC
State location: MA | State of Inc.: DE | Fiscal Year End: 1231
(Assistant Director Office: 10)
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Items 1 - 40  0001113232 Filings RSS Feed
Filings Format Description Filing Date File/Film Number
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001558370-17-001778 (34 Act)  Size: 11 MB
2017-03-14 000-30941
17688931
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-16-009157 (34 Act)  Size: 4 MB
2016-11-03 000-30941
161970407
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001558370-16-007667 (34 Act)  Size: 4 MB
2016-08-08 000-30941
161814897
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-16-118129 (34 Act)  Size: 3 MB
2016-05-05 000-30941
161622519
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-16-010788 (34 Act)  Size: 9 MB
2016-03-04 000-30941
161485924
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-15-076156 (34 Act)  Size: 4 MB
2015-11-05 000-30941
151199776
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-15-056360 (34 Act)  Size: 4 MB
2015-08-05 000-30941
151028378
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-15-034879 (34 Act)  Size: 4 MB
2015-05-06 000-30941
15837145
10-K/A  Documents   Interactive Data [Amend] Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-15-002063 (34 Act)  Size: 11 MB
2015-03-12 000-30941
15695512
10-K  Documents Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-15-001994 (34 Act)  Size: 2 MB
2015-03-11 000-30941
15693417
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-14-077729 (34 Act)  Size: 4 MB
2014-11-06 000-30941
141201065
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-14-058705 (34 Act)  Size: 3 MB
2014-08-08 000-30941
141026304
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-14-036345 (34 Act)  Size: 5 MB
2014-05-08 000-30941
14824031
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-14-001681 (34 Act)  Size: 10 MB
2014-03-03 000-30941
14660234
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-13-082657 (34 Act)  Size: 5 MB
2013-11-08 000-30941
131203188
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-13-059171 (34 Act)  Size: 7 MB
2013-08-02 000-30941
131004688
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-13-037564 (34 Act)  Size: 4 MB
2013-05-06 000-30941
13815729
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-13-002045 (34 Act)  Size: 8 MB
2013-03-01 000-30941
13656218
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-12-074161 (34 Act)  Size: 3 MB
2012-11-05 000-30941
121179932
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-12-055070 (34 Act)  Size: 3 MB
2012-08-07 000-30941
121012116
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-12-033183 (34 Act)  Size: 2 MB
2012-05-04 000-30941
12814145
10-K  Documents   Interactive Data Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-12-001874 (34 Act)  Size: 3 MB
2012-02-29 000-30941
12651593
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-11-061003 (34 Act)  Size: 1 MB
2011-11-04 000-30941
111180274
10-Q  Documents   Interactive Data Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-11-044192 (34 Act)  Size: 2 MB
2011-08-05 000-30941
111013623
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-11-026844 (34 Act)  Size: 1 MB
2011-05-06 000-30941
11819501
10-K  Documents Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-11-002119 (34 Act)  Size: 934 KB
2011-03-14 000-30941
11686152
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-10-056579 (34 Act)  Size: 552 KB
2010-11-05 000-30941
101169364
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-10-042765 (34 Act)  Size: 532 KB
2010-08-06 000-30941
10998771
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-10-027926 (34 Act)  Size: 1 MB
2010-05-12 000-30941
10824068
10-K  Documents Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-10-002204 (34 Act)  Size: 1 MB
2010-03-15 000-30941
10681447
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-09-063320 (34 Act)  Size: 581 KB
2009-11-06 000-30941
091164493
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001047469-09-007468 (34 Act)  Size: 330 KB
2009-08-10 000-30941
09998924
10-K/A  Documents [Amend] Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001104659-09-040659 (34 Act)  Size: 1 MB
2009-06-29 000-30941
09915559
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001047469-09-005327 (34 Act)  Size: 287 KB
2009-05-11 000-30941
09812982
10-K  Documents Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001047469-09-003537 (34 Act)  Size: 1 MB
2009-03-31 000-30941
09719735
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001047469-08-011941 (34 Act)  Size: 373 KB
2008-11-10 000-30941
081177109
10-K/A  Documents [Amend] Annual report [Section 13 and 15(d), not S-K Item 405]
Acc-no: 0001104659-08-061048 (34 Act)  Size: 946 KB
2008-09-29 000-30941
081095533
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001047469-08-009059 (34 Act)  Size: 320 KB
2008-08-08 000-30941
081002957
10-Q/A  Documents [Amend] Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001104659-08-039493 (34 Act)  Size: 389 KB
2008-06-12 000-30941
08894793
10-Q  Documents Quarterly report [Sections 13 or 15(d)]
Acc-no: 0001047469-08-006393 (34 Act)  Size: 795 KB
2008-05-12 000-30941
08823369