X0202 4 2004-03-29 0 0000720500 AMTECH SYSTEMS INC ASYS 0000947733 THAW BRUCE R/FA 45 BANFI PLAZA FARMINGDALE NY 11735 1 0 0 0 Stock option 5.65 2004-03-29 4 A 0 5000 5.65 A 2005-03-29 2014-03-29 Amtech Systems, Inc. $.01 par value common stock 5000 37000 D Option to purchase Amtech Systems, Inc., $.01 par value common stock. One-third of the stock options granted vest on each of the first three anniversaries of the grant date. Any unexercised stock options expire 90 days after membership on the Board of Directors terminates, except that the expiration is one year from the date of termination if such termination is the result of death. The Company volunteered to make all Section 16 filings on behalf of the Director and, therefore, accepts responsibility for the late filing of this Form 4. Robert T. Hass, by power of attorney 2004-05-05