-----BEGIN PRIVACY-ENHANCED MESSAGE-----
Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 SpiF3pba1tarv1Gtswe2dg1aOyi7uqEQIhdteAt/L7nu170B7XwUSj0j3vGpakWE
 8icGGkcDGGD0ZEGK1jdm9A==

<SEC-DOCUMENT>0000940454-03-000001.txt : 20031229
<SEC-HEADER>0000940454-03-000001.hdr.sgml : 20031225
<ACCEPTANCE-DATETIME>20031229150355
ACCESSION NUMBER:		0000940454-03-000001
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20031219
FILED AS OF DATE:		20031229

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			ENTEGRIS INC
		CENTRAL INDEX KEY:			0001101302
		STANDARD INDUSTRIAL CLASSIFICATION:	PLASTICS PRODUCTS, NEC [3089]
		IRS NUMBER:				411941551
		STATE OF INCORPORATION:			MN
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		3500 LYMAN BOULEVARD
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318
		BUSINESS PHONE:		6125563131

	MAIL ADDRESS:	
		STREET 1:		3500 LYMAN BOULEVARD
		CITY:			CHASKA
		STATE:			MN
		ZIP:			55318

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			SULLIVAN BRIAN F
		CENTRAL INDEX KEY:			0000940454
		STATE OF INCORPORATION:			MN
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30789
		FILM NUMBER:		031075310

	BUSINESS ADDRESS:	
		STREET 1:		2229 EDGEWOOD AVENUE SOUTH
		STREET 2:		RECOVERY ENGINEERING INC
		CITY:			MINNEAPOLIS
		STATE:			MN
		ZIP:			55426
		BUSINESS PHONE:		6127978217

	MAIL ADDRESS:	
		STREET 1:		2229 EDGEWOOD AVENUE SOUTH
		CITY:			MINNEAPOLIS
		STATE:			MN
		ZIP:			55426
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>
    <schemaVersion>X0201</schemaVersion>

    <documentType>3</documentType><periodOfReport>2003-12-19</periodOfReport>
    <noSecuritiesOwned>0</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001101302</issuerCik>
        <issuerName>ENTEGRIS INC</issuerName>
        <issuerTradingSymbol>ENTG</issuerTradingSymbol></issuer><reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0000940454</rptOwnerCik>
            <rptOwnerName>SULLIVAN BRIAN F</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>3500 LYMAN BOULEVARD</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>CHASKA</rptOwnerCity>
            <rptOwnerState>MN</rptOwnerState>
            <rptOwnerZipCode>55318</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
            <reportingOwnerRelationship>
<isDirector>1</isDirector><isOfficer>0</isOfficer><isTenPercentOwner>0</isTenPercentOwner><isOther>0</isOther></reportingOwnerRelationship></reportingOwner><derivativeTable><derivativeHolding><securityTitle><value>Stock Option (Right to Buy)</value></securityTitle><conversionOrExercisePrice><value>12.71</value></conversionOrExercisePrice><exerciseDate><value>2004-06-19</value></exerciseDate><expirationDate><value>2013-12-19</value></expirationDate><underlyingSecurity><underlyingSecurityTitle><value>Common Stock</value></underlyingSecurityTitle><underlyingSecurityShares><value>9000</value></underlyingSecurityShares></underlyingSecurity><ownershipNature><directOrIndirectOwnership><value>D</value></directOrIndirectOwnership><natureOfOwnership><value/></natureOfOwnership></ownershipNature></derivativeHolding></derivativeTable><footnotes/><remarks/><ownerSignature><signatureName>Lori Cameron, Attorney-in-Fact for Brian F. Sullivan</signatureName><signatureDate>2003-12-29</signatureDate></ownerSignature></ownershi
pDocument>

</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
-----END PRIVACY-ENHANCED MESSAGE-----