Exhibit 23.1

August 7, 2006

Deloitte Accountants B.V.

Flight Forum 1

5657 DA Eindhoven

P.O. Box 782

5600 AT Eindhoven

Netherlands

Tel: +31 (040) 2345000

Fax: +31 (040) 2345407

www.deloitte.nl

ASML Holding N.V.

De Run 6501

5504 DR VELDHOVEN

Date	From:	Our reference
August 7, 2006	J.G.C.M. Buné		op9949

CONSENT OF INDEPENDENT AUDITORS

We herewith give our consent to the incorporation by reference in this Registration Statement on Form S-8 of ASML Holding N.V. of our report dated January 27, 2006 as included in the Annual Report on Form 20-F of ASML Holding N.V. for the year ended December 31, 2005 filed with the Commission on January 27, 2006.

Deloitte Accountants B.V.

/s/ J.G.C.M. Buné

J.G.C.M. Buné